Micro coolng device

The photoetching of ceramic substrate like Al2O3, AlN, Si3N4

Direct copper metallization by wet process in the through glass via (TGV)

Polyimide via filling on the copper plate

etched polyimide pattern(thickness 30um) on copper sheet

through ceramic via by wet etching and crystallization

polyimide wet etching

pure silver filled TGV(through glass via)

via filled TGV glass substrate

metal filter for the detection of circulating tumor cells

surface etched through glass via(TGV)

Glass Image by crystallization

glass substrate with high surface energy