The ceramic plate is generally micromachined using laser process.
It needs high process and equipments cost.
But if the micromachining is done by photolithography based process, it is very useful to the industry.
At this time I made such photolithography based microholes in the ceramic substrates like Al2O3, AlN and Si3N4.
Any shapes of holes were formed and a number of holes could be made simultaneosly.
It needs high process and equipments cost.
But if the micromachining is done by photolithography based process, it is very useful to the industry.
At this time I made such photolithography based microholes in the ceramic substrates like Al2O3, AlN and Si3N4.
Any shapes of holes were formed and a number of holes could be made simultaneosly.
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| Al2O3 substrate with photoetched holes |
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| microscopic image of a unit above picture |
What a nice article! You’ve shared very useful information. You really did an awesome job. Thank you so much. Ceramic CNC Machining From Valley Design.
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