Micro coolng device

I thought the below cooling syster for the power device.

Micro heat sink can be fabricated using electroforming process.

The diaphram is vibrated due to the electric signal and this result in the wind.

Piezoelectric, magnetic induction or magnetostriction can be used for the diaphram actuation methods.

Using glass/ceramic micromachining process, below magnetic cooling system is possible.
High Q planar coil is fabricated by this method.
Soft magnetic material result in high field and high attraction power.