About 20 years ago, I discovered the negative photosensitive glass process, which is the phenomenon that unexposed area is crystallized after heat treatment.
The structures by this process have very high aspect ratio compared to conventional photosensitive glass process.
Yesterday, I made it by new process.
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| The glass after heat treatment : the white pillars were made from unexposed glass pattern. |
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| An image of etching profile |
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| SEM image of negative photosensitive glass process. An image in the article at the 2001 MRS-Boston. General photosensitive glass has low etching selectivity. So the structure like this cannot be made. The wall width is under 50um, the height 5~600um |
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