It is possible to make the holes with certain(arbitrary) angle.
Below is made by UV lithography and anisotropic wet etching
By recent test using laser exposure and other method, it is possible to make holes with different angles each other.
- glass thickness : 800 um
- hole diameter : 80 um
Below is made by UV lithography and anisotropic wet etching
By recent test using laser exposure and other method, it is possible to make holes with different angles each other.
- glass thickness : 800 um
- hole diameter : 80 um
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