Glass micromachining by negative photosensitive glass process

Below microstructures were fabricated by negative photosensitive glass process which I discovered in 1998.

Using this process, it is possible to make finer microstructures than that by conventional photosensitive glass process(positive).

- honey comb(up) : 1mm high glass microstructure(penetrated holes)
- channel  (down)  : 600um deep channel

* related article : 2001 MRS, 2002 HARMST